Optoelectoronics Device Technology VCSEL (Vertical Cavity Surface Emitting Laser)

High density two-dimensional VCSEL array with highly uniform optical characteristics

With a two-dimensional array of 32 channels, this surface-emitting semiconductor laser is used as a light source in the scanning-type exposure devices of copy machines and other equipment. Variations caused by optical output characteristics are held to no more than 1%, and with our in situ monitoring system, the active area diameter is kept uniform.

In situ monitoring system

This system employs a Fujifilm-developed system that utilizes changes in the light reflectivity on the wafer’s surface to make observable the active area diameter, which is invisible to the naked eye.

CORE TECHNOLOGIES

FUNDAMENTAL

  • Optics

Optoelectoronics Device Technology SLED (Self-Scanning Light Emitting Device)

High density large-scale light-emitting device array with a self-scanning function

This is a light-emitting thyristor semiconductor device element integrating a light-emitting function and a self-scanning function that sequentially selects light-emitting points. Since an element requires only two thyristors per bit, integration in a small area is possible. This contributes to smaller sizes and lower costs for the print heads of copy machines and other equipment.

High-density integration of light-emitting device elements

The self-scanning function uses only four to five signal lines to drive more than 500 light-emitting device elements, thereby greatly reducing the number of gold wires. In addition, since light-emitting device elements are integrated at intervals of 21μm, 1200 dpi high-resolution image quality is possible.

CORE TECHNOLOGIES

FUNDAMENTAL

  • Optics