PSE Capsule

Supports treatment equipment of the next generation of single-wafer process.

Overview

The capsule uses a PSE membrane that has been received favorably. It is small in size and delivers a high flow rate and high precision.

The flow rate equivalent to that of conventional single (1-stage) products of other companies is realized with a half (1/2 stage) product.
The proprietary inner dense layer of the PSE membrane ensures reliable retention of fine particles.

Main applications

  • Filtration of purified water used by single-wafer wet cleaning equipment
  • Filtration of chemicals used by single-wafer wet cleaning equipment
  • Final rinsing water for developers

Specifications

Table of Performance Characteristics

Item Unit Performance Remarks
Pore size µm 0.1 0.2 0.45 0.1 0.2 0.45  
Nominal size   Q H  
Size Length mm 152 210 *
Outer diameter mm 93.5  
Maximum differential pressure 25℃ MPa 0.54 (Positive pressure)  
Heat resistance MAX℃ 40℃ **
PH area to be used   1 - 14 ***

Note

  • * Refer to “Size and nozzle diameter” below.
  • ** Continuous operating temperature
  • *** In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.
Material
Part name Material
Housing Polypropylene
Element guard Polypropylene
Center core Polypropylene
Support Polypropylene
Membrane filter Polysulfone (Asymmetric membrane)

Initial flow rate and initial pressure loss

[Image] Initial flow rate and initial pressure loss

Abbreviated product name

[Image] Abbreviated product name
  Quarter (1/4 size) Half (1/2 size)
0.1µm PSED10QW1 PSED10HW1
0.2µm PSED20QW1 PSED20HW1
0.45µm PSED45QW1 PSED45HW1

Size and nozzle diameters

[Image] Size and Nozzle Diameters
Unit: mm
PSED Q PSED H
A 93.5
B 92
C 87
D 35
E 35
F 140 196
G 86.7
L 152 210
N-① R1/2 R3/4
N-② R1/2 R3/4
N-③ With R1/4 cap
N-④ With R1/4 cap

Note

  • For details of the methods of use, refer to the instruction manual that comes with the product.
  • The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
  • Specifications are subject to change for improvement purposes without prior notice.