PSE Cartridge UXL/SXL Type

An extraordinarily high flow rate type of cartridge has been added to the lineup of PSE cartridges that have been received favorably because of their high flow rate and high retention performance.
Best suited for Gen 8 through Gen 10 large LCD substrates.

Overview

  • Ready for use with larger LCD substrates.
  • Realized a flow rate approximately 2 times* that of conventional ultra-high flow rate filters.
  • Best suited for cleaning Gen 8 through Gen 10 large LCD substrates.

Note

  • * UXL type

Features

  • Lineup — The lineup includes 2 types of cartridges of different filtering areas (UXL type / SXL type).
  • Extraordinarily high flow rate — The cartridge realizes an extraordinarily high flow rate equivalent to approximately 2 times the ultra-high flow rate of the PSE cartridge XL type. A flow rate of 300 L/min.** is ensured with a pore size of 0.2 µm. (At ΔP = 0.03 MPa)
  • High fine particle retention performance — The proprietary inner dense layer of the PSE membrane that features a well-defined pore size distribution ensures reliable retention of fine particles.
  • Can be used for housings that are ready in use with the AS568-334. — The cartridge fits housings that are ready for use with the filer O-ring size AS568-334 type. It can be used at a still higher flow rate by combining it with a housing manufactured by us.
  • Robustly built cartridge — Robustness has been realized by means of high strength polysulfone membrane and a newly designed main body.

Note

  • ** UXL type

Main applications

The cartridge employs a favorably received membrane of proprietary asymmetrical structure (PSE membrane).
It demonstrates excellent performance in the following applications that require high fine particle retention performance, a high flow rate and long service life.

  • Filtration of cleaning water used by wet process equipment to make large substrates for LCD

Specifications

Table of Performance Characteristics

Item Unit Performance Remarks
Pore size µm 0.1 0.2 0.45 1.2
Size Length mm 273  
Outer diameter mm 130  
Maximum differential pressure 25℃ MPa 0.34 (Positive pressure)  
PH area to be used   1 -14 *

Note

  • * In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.
Material
Part name Material
Membrane filter Polysulfone (Asymmetric membrane)
Support material Polypropylene
Case Polypropylene
O-ring EPDM (standard)

O-ring size: JIS-P65 (AS568-334 or equivalent)

Initial flow rate and initial pressure loss (UXL Type)

[Image] Initial flow rate and initial pressure loss (UXL Type)

Initial flow rate and initial pressure loss (SXL Type)

[Image] Initial flow rate and initial pressure loss (SXL Type)

Size

[Image] Size

Note

  • For details of the methods of use, refer to the instruction manual that comes with the product.
  • The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
  • Specifications are subject to change for improvement purposes without prior notice.

Abbreviated product name

[Image] Abbreviated product name

Related products

The following 2 types of housings allow the extraordinarily high flow rate filters to fully demonstrate their performance.

  • FPSUX TE1 (made of polypropylene)
  • FS6LJM 1-1 50 FET 1 (made of stainless steel)

Note

  • For details of the methods of use, refer to the instruction manual that comes with the product.
  • The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
  • Specifications are subject to change for improvement purposes without prior notice.