Light source | He-Ne laser |
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Aperture size (Diameter) | 60 mm |
Sensitivity | λ / 2 (0.3 µm / fringe) |
Accuracy of transmission flat | λ / 20 |
Magnification | 1 × |
Dimensions (W × D × H) | Approx. 300 × 320 × 590 mm |
Weight | Approx. 30 kg |
Power requirements | AC 100, 120, 220 or 240V 50 / 60 Hz 1 - 2A |
Optional accessories |
|
Light source | He-Ne laser |
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Aperture size (Diameter) | 102 mm 150 mm |
Sensitivity | λ / 2 (0.3 µm / fringe) |
Accuracy of transmission flat | λ / 20 |
Magnification | 6 × zoom |
Dimensions (W × D × H) | Approx. 305 × 365 × 765 mm |
Weight | Approx. 56 kg |
Power requirements | AC 100 - 120V 2A AC 200 - 240V 1A 50 / 60 Hz |
Analyzer | - |
Optional accessories |
|
Light source | He-Ne laser |
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Aperture size (Diameter) | 310 mm |
Sensitivity | λ / 2 (0.3 µm / fringe) |
Accuracy of transmission flat | λ / 20 |
Sample position | horizontal (interferometer, downward) |
Magnification | 6 × zoom |
Dimensions (W × D × H) | Approx. 1,440 × 1,220 × 2,115 mm (the vibration isolation table included) |
Weight | Approx. 950 Kg (the vibration isolation table included) |
Power requirements | AC 100 - 120V 2A AC 200 - 240V 1A 50 / 60 Hz |
Analyzer | A1 included as standard |
Light source | He-Ne laser |
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Aperture size (Diameter) | 60 mm |
Sensitivity | λ / 2 (0.3 µm / fringe) |
Accuracy of transmission flat | λ / 20 |
Magnification | 1 × |
Dimensions (W × D × H) | Approx. 300 × 320 × 785 mm |
Weight | Approx. 60 kg (the vibration isolation table included) |
Power requirements | AC 100, 120, 220 or 240V 50 / 60 Hz 1 - 2A |
Optional accessories |
|
Light source | He-Ne laser |
---|---|
Aperture size (Diameter) | 60 mm |
Sensitivity | λ / 2 (0.3 µm / fringe) |
Accuracy of transmission flat | λ / 20 |
Magnification | 1 × |
Dimensions (W × D × H) | Approx. 720 × 635 × 1,245 mm |
Weight | Approx. 150 kg |
Power requirements | AC 100, 120, 220 or 240V 50 / 60 Hz 1 - 2A |
Optional accessories |
|
Standard model | High spec model | |
---|---|---|
Light source | He-Ne laser | |
Aperture size (Diameter) | 60 mm | |
Sensitivity | λ / 2 (0.3 µm / fringe) | |
Accuracy of transmission flat | λ / 20 | |
Magnification | 1 × | |
XY Stage working range | ±2 mm or more | |
Z stage working range (Rough slow motion manual control available) |
120 mm or more | 360 mm or more |
Dimensions (W × D × H) |
Approx. 400 × 500 × 800 mm | Approx. 400 × 500 × 1,040 mm |
Weight | Approx. 40 kg | Approx. 50 kg |
Power requirements | AC 100V 50 - 60 Hz 1A |
|
Optional accessories | Magnetic scale |
V10 | R10 | IR10 | |
---|---|---|---|
Light source | 405 ±5 nm | 650 ±10 nm | 790 ±15 nm |
Aperture size (Diameter) | 10 mm | ||
Accuracy of transmission flat | 32 nm P-V | ||
Magnification | 1 ×, 2 ×, 5 × (Manual) | ||
Polarization | Circular or linear (Manual changeover) | ||
Dimensions (W × D × H) |
Approx. 720 × 700 × 1,120 mm (the vibration isolation table included) |
||
Weight | Approx. 230 kg (the vibration isolation table included) | ||
Power requirements | AC 100V 50 / 60 Hz 2A |
AC 100V 50 / 60 Hz 2A |
|
Optional accessories |
|
- |
|
Light source wavelength | 2 wavelength selectable from 405 ±5 nm, 650 ±10 nm or 790 ±15 nm |
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Aperture size (Diameter) | 10 mm |
Accuracy of transmission flat | 32 nm P-V |
Magnification | 1 ×, 2 ×, 5 × (Manual) |
Polarization | Circular or linear (Manual changeover) |
Dimensions (W × D × H) | Approx. 1,000 × 800 × 1,200 mm |
Weight | Approx. 350 kg |
Power requirements | AC 100V 50 / 60 Hz 2A |
Optional accessories |
|
Display items | P-V, RMS, bird's eye view, contour map, profiles, Seidel aberration, fifth aberration, Zernike polynomials (till the tenth aberration) |
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Pixels | 256 × 256 / 512 × 512 |
A/D conversion | 10 bit |
Components | Computer, LCD, Color printer, Computer rack, analysis software kit |
Other features | Data save, plural masks, code V* output, data substraction |
Dimensions (W × D × H) | Approx. 700 × 700 × 1,500 mm |
Weight | Approx. 70 kg (rack included) |
Power requirements | AC 100V 50 / 60 Hz 5A |