Switzerland

PSE Capsule

NEW

Supports treatment equipment of the next generation of single-wafer process.

Overview

The capsule uses a PSE membrane that has been received favorably. It is small in size and delivers a high flow rate and high precision.

The flow rate equivalent to that of conventional single (1-stage) products of other companies is realized with a half (1/2 stage) product.
The proprietary inner dense layer of the PSE membrane ensures reliable retention of fine particles.

Main applications

  • Filtration of purified water used by single-wafer wet cleaning equipment

  • Filtration of chemicals used by single-wafer wet cleaning equipment

  • Final rinsing water for developers

Specifications

Table of Performance Characteristics

Item

Unit

Performance

Remarks

Pore size

µm

0.1

0.2

0.45

0.1

0.2

0.45

 

Nominal size

 

Q

H

 

Size

Length

mm

152

210

*1

Outer diameter

mm

93.5

 

Maximum differential pressure

25℃

MPa

0.54 (Positive pressure)

 

Heat resistance

MAX℃

40℃

*2

PH area to be used

 

1 - 14

*3

  • *1 Refer to “Size and nozzle diameter” below.
  • *2 Continuous operating temperature
  • *3 In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.

Material

Part name

Material

Housing

Polypropylene

Element guard

Polypropylene

Center core

Polypropylene

Support

Polypropylene

Membrane filter

Polysulfone (Asymmetric membrane)

Initial flow rate and initial pressure loss

Abbreviated product name

 

Quarter (1/4 size)

Half (1/2 size)

0.1µm

PSED10QW1

PSED10HW1

0.2µm

PSED20QW1

PSED20HW1

0.45µm

PSED45QW1

PSED45HW1

Size and nozzle diameters

 

PSED Q

PSED H

A

93.5

B

92

C

87

D

35

E

35

F

140

196

G

86.7

L

152

210

N-①

R1/2

R3/4

N-②

R1/2

R3/4

N-③

With R1/4 cap

N-④

With R1/4 cap

Unit: mm

  • * For details of the methods of use, refer to the instruction manual that comes with the product.
  • * The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
  • * Specifications are subject to change for improvement purposes without prior notice.