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Distribution Equipment

Chemical delivery systems designed with an open architecture compatible to many chemistries

Features & Benefits

  • Full access from the front
  • Slide out scales
  • Separated electronics
  • Easy access from top opening cabinets
  • Chemical verification
  • Spill detection
  • Step by step software
  • Automated purge
  • Password protected operation mode
  • Open Architecture, no process or container patents
  • Will work with any supplier's containers
  • Supports 1.2L to 200L container sizes
  • Used for logic, DRAM, ASIC, DSPs, etc.
  • In use with all major OEM tools
  • BKM at numerous major end users
  • World Wide presence
  • Genstream® 3000 advanced comprehensive chemical delivery systems