- GAR Series
The products in the GAR series are suitable for a variety of applications that require 193nm dry exposure. - FAiRS Series for PTI (positive tone imaging)
The products in the FAiRS series are suitable for a variety of applications that require 193nm immersion exposure and positive tone imaging. - FAiRS Series for NTI (negative tone imaging)
The products in the FAiRS series are suitable for a variety of applications that require 193nm immersion exposure and negative tone imaging.
Wide array of high resolution imaging systems for 193 nm exposure including positive dry and immersion imaging and negative tone imaging (NTI)
- High throughput
- Superior resolution
- Wide process windows
- Low defect levels
- Vertical profiles
