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Semiconductor Materials

Cleaning/Drying & Etchant

Cleaning/Drying

Cleaning/Drying: Applications

Three beakers filled with Red, Green, and Blue liquids

Cleaning/Drying - Applications

Aqueous post etch cleaners compatible with aluminum, copper, and advanced metal alloys, anti-reflective layers, SiO₂ and ultra low-k dielectrics

Applications include post etch clean at via, metal line, and bond pad levels on Al alloys, anti-reflective layers, and SiO₂ dielectrics, and etch residue removal for advanced MOL and BEOL processes with Cu, low-k and ultra-low-k compatibility.

Cleaning/Drying - Applications

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