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Home Business Semiconductor Materials Cleaners and Etchants Cleaning/Drying Cleaners: Features & Benefits
Three beakers filled with Red, Green, and Blue liquids

Cleaning/Drying - Features & Benefits

Aqueous post etch cleaners compatible with aluminum, copper, and advanced metal alloys, anti-reflective layers, SiO2 and ultra low-k dielectrics

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Features & Benefits
  • Wide process latitude
  • Compatible with spray and batch tool applications
  • Compelling cost of ownership advantage over hydroxylamine (HA) solvent-based cleaners - Direct DI water rinse 
    • Eliminates IPA rinsing chemical cost
    • Increased throughput by eliminating IPA-rinse steps
  • Safe and easy to use
  • Excellent process equipment materials compatibility
  • Superior metals and ILD compatibility
  • Packaging options:
    • 4 L HDPE bottle
    • 200 L drum
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