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Home Business Semiconductor Materials Cleaning/Drying & Etchant Cleaning/Drying Cleaning/Drying: Features & Benefits
Three beakers filled with Red, Green, and Blue liquids

Cleaning/Drying - Features & Benefits

Aqueous post etch cleaners compatible with aluminum, copper, and advanced metal alloys, anti-reflective layers, SiO2 and ultra low-k dielectrics

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Features & Benefits
  • Wide process latitude
  • Compatible with spray and batch tool applications
  • Cost of ownership advantage over solvent-based cleaners - Direct DI water rinse 
    • Eliminates added rinsing chemical cost and increases throughput by eliminating chemical steps
  • Safe and easy to use
  • Compatible with advanced process equipment materials
  • Superior metals, ILD, and ULK compatibility
  • Product purity is continuously verified through the use of state-of-the-art analytical tools
  • Manufactured and packaged at plants in US and Asia
  • Different grades depending on the etchant type
  • Certain products are offered with or without surfactant
  • See our Applications overview for the different etchant types
  • Packaging options:
    • 4 x 4L Bottles
    • 200L Drums (one-way or returnable)
    • 1000L Totes (one-way or returnable)
    • Bulk Delivery (depends on location)

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