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Home Business Semiconductor Materials Photoresists ArF (193nm) ArF (193nm): Applications
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ArF (193nm) - Applications

Materials for positive dry and immersion imaging, and negative tone imaging (NTI)

ArF Immersion Resist
CH
Two images of FAiR, P300CD90 and IsoCH80, 9520 series of NTI.
L/S
Two images of FAiR, P90Line40(FT110nm) of NTI and P76Line38(FT90nm) of PTI, 9100 series.