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Positive and negative tone resist series for a wide array of e-beam imaging applications
FEP series
FEN series
ArF (193nm)
Materials for positive dry and immersion imaging, and negative tone development (NTD)
KrF (248nm)
Positive tone KrF photoresists covering a broad range of applications
i-Line, g-Line and Broadband
Extensive series of mid-uv sensitive photoresists for critical to non-critical applications encompassing sub-0.30µm to >1.0µm resolution.
Negative (Polyisoprene-based)
Multiple series of negative tone, polyisoprene-based resist systems
