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Home Business Semiconductor Materials Photoresists e-Beam e-Beam: Applications
Semiconductors Photoresist E-Beam

e-Beam - Applications

Positive and negative tone resist series for a wide array of e-beam imaging applications

E-beam Resist for Mask Production
There are two tones in E-beam Resist, which are negative and positive.We have product line-ups for both. For positive, there are FEP series(FEP-171H, FEP171and 171D and FEP-171J), EFP series(XFP-255HC1,XFP-355,XFP-555)and SLP series which is under evaluation. For negative, there are FEN series(FEN-271),XFN series(XFN-003 series) and SLN series which is under evaluation.