man holding silicon wafer

KrF (248nm)

Positive tone KrF photoresists covering a broad range of applications

Features & Benefits

GKR series are positive tone KrF photoresist systems that cover a wide range of applications.

  • High aspect ratio application
  • Superior resistance to plasma etching & ion implantation
  • High thermal stability
  • Wide process windows
  • Low defect levels
  • Long term stability
  • Vertical profiles
  • Wide thickness coverage