GKR series offers a wide lineup of products from high-thickness films to high-resolution products to meet the various requirements of customers.
- GKR-46xx/32xx series (for implant)
- GKR-53xx series (for C/H)
- GKR-63xx series (for L/S)
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Positive tone KrF photoresists covering a broad range of applications
GKR series offers a wide lineup of products from high-thickness films to high-resolution products to meet the various requirements of customers.