Distribution Equipment

Advanced Low K

Advanced dielectrics for 45/22 nm node and below

Gap Fill and Recovery

Supporting chemistry for low K dielectrics

Dielectric and Dopant Sources

High purity precursors supported by state of the art analytical testing and production

Others

Chlorine sources, adhesion promoters, etchants, cleaners, reducers

Temperature Controller

Precision temperature control of your precursor with the ease of front loading