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Semiconductor Materials

Photoresists

NIL (Nanoimprint Lithography)

NIL (Nanoimprint Lithography): Applications

An image of a semiconductor substrate with blue and orange lights.

NIL (Nanoimprint Lithography) - Applications

NIL materials for semiconductor lithography process

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Advanced semiconductor lithograpy as EUV or ArF

NIL process image

Image of resist NIL component structure. From the bottom, there is a substrate base layer, an adhesion material, and a resist layer of UV-curable resin processed into a convex shape, and on top of that is a quartz mask processed into a concave shape.

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