Micro Filter : Cartridge Type

Standard type that meets various needs over a wide area.

Smallest pore diameter type that removes particles as small as 0.03 µm.

Minute pore diameter type that removes particles as small as 0.05 µm.

High flow rate type supporting the manufacturing of LCD panels up to Gen. 6 and 300-mm wafers.

High flow rate type supporting the manufacturing of LCD panels from Gen. 6 to Gen. 8.

High flow rate type supporting the manufacturing of LCD panels from Gen. 8 to Gen. 10.

General-use, economical type for excellent particle-capturing performance and sufficiently high flow rate.

Compact capsule type with a high flow rate and usable as disposable filters.

Standard type of nominal filter made of non-woven polypropylene fabric.

Extra-high flow rate type, made of non-woven polypropylene fabric, supports the manufacturing of LCD panels from Gen. 8 to Gen. 10.