Russia

PSE05 Cartridge

NEW

The 0.05 µm grade has been added to the lineup of PSE cartridges that have been received favorably because of their high flow rate and high retention performance.

Overview

Ready for use under design rules responding to miniaturization.

The particle-removing grade for a single-pass operation stands at 0.05 µm.
The flow rate is decreased by only 15% as compared with the currently produced 0.1µm cartridges.
The cartridge is of the same size as earlier cartridges (diameter: 70mm), so the housing does not need to be replaced.

Features

Excellent retention performance

The inner dense layer peculiar to the PSE membrane ensures that even particles of 0.05 µm are reliably retained.

High flow rate

The flow rate is decreased by only around 15% as compared with the conventional 0.1 µm single (1-stage) cartridges.

Long useful life

The structure peculiar to the PSE membrane offers a long useful life.

Main applications

Since the cartridge employs the PSE membrane that has been received a favorable reputation, it is best suited for the following lines that require the removal of ultra-fine particles.

  • Filtration of purified water for cleaning equipment in the 300 mm wafer manufacturing process

  • Filtration of chemicals for cleaning equipment in the 300 mm wafer manufacturing process

  • Filtration of plating fluids, developers, etc.

Specifications

Table of Performance Characteristics

Item

Unit

Performance

Remarks

Pore size

µm

0.05

 

Size

Length

mm

264

*1

Outer diameter

mm

70

 

Maximum differential pressure

25℃

MPa

0.54 (Positive pressure)

 

25℃

MPa

0.34 (Negative pressure)

 

Heat resistance

90℃

*2

Applicable pH range

 

1 - 14

*3

  • *1 Please contact us if you need detailed dimensions.
  • *2 Continuous operating temperature
  • *3 In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.

Material

Part name

Material

Guard

Polypropylene

Center core

Polypropylene

Support

Polypropylene

Membrane filter

Polysulfone (Asymmetric membrane)

O-ring

EPDM (Silicon, Viton)

 

Pore size

M type

MP type

Package unit

1

PSECM05SPPW1

PSECMP05SPPW1

12

PSECM05SPPW12

PSECMP05SPPW12