PSE Capsule

Overview

The capsule uses a PSE membrane that has been received favorably. It is small in size and delivers a high flow rate and high precision.

The flow rate equivalent to that of conventional single (1-stage) products of other companies is realized with a half (1/2 stage) product.
The proprietary inner dense layer of the PSE membrane ensures reliable retention of fine particles.

Main applications

Filtration of purified water used by single-wafer wet cleaning equipment
Filtration of chemicals used by single-wafer wet cleaning equipment
Final rinsing water for developers

Specifications

Table of Performance Characteristics

Item		Unit	Performance						Remarks
Pore size		µm	0.1	0.2	0.45	0.1	0.2	0.45
Nominal size			Q			H
Size	Length	mm	152			210			^*1
Size	Outer diameter	mm	93.5
Maximum differential pressure	25℃	MPa	0.54 (Positive pressure)
Heat resistance		MAX℃	40℃						^*2
PH area to be used			1 - 14						^*3

*1 Refer to “Size and nozzle diameter” below.
*2 Continuous operating temperature
*3 In the case of using the cartridge for chemical fluid filtration, prior evaluation should be carried out under the planned conditions of use.

Material

Part name	Material
Housing	Polypropylene
Element guard	Polypropylene
Center core	Polypropylene
Support	Polypropylene
Membrane filter	Polysulfone (Asymmetric membrane)

Initial flow rate and initial pressure loss

Abbreviated product name

	Quarter (1/4 size)	Half (1/2 size)
0.1µm	PSED10QW1	PSED10HW1
0.2µm	PSED20QW1	PSED20HW1
0.45µm	PSED45QW1	PSED45HW1

	PSED Q	PSED H
A	93.5
B	92
C	87
D	35
E	35
F	140	196
G	86.7
L	152	210
N-①	R1/2	R3/4
N-②	R1/2	R3/4
N-③	With R1/4 cap
N-④	With R1/4 cap

Unit: mm

* For details of the methods of use, refer to the instruction manual that comes with the product.
* The product may be built to order, depending on the shape and/or size. For details, contact your sales agent.
* Specifications are subject to change for improvement purposes without prior notice.

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